Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1910
Print ISSN : 1348-8236
2P3-10 A piezoelectric micromachined ultrasonic transducer based on 40% ScAlN thick films without MEMS technology
Itsuki Endo, Takahiko Yanagitani
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2025 Volume 46 Pages 115-

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