Soft X-Ray Absorption Measurements of Several-Tens-Thick Insulating Films using a Total Electron Yield Method

Abstract

X-ray absorption spectra (XAS) of insulating materials such as papers, clothes, and tapes which are put on conductive carbon tape have been measured using a total-electron-yield (TEY) method. TEY-XAS measurements were performed in BL-6.3.2 at the Advanced Light Source and in BL10 at the NewSUBARU. Although thickness of the insulating samples is several tens μm, sample currents of more than several pA can be detected and TEY-XAS were successfully obtained in C K, O K, and F K regions.