Generation of Metal Ions Using Short-Pulse High Power Impulse Magnetron Sputtering
Released on J-STAGE: August 25, 2024 |
Volume 31
Issue 2
Pages 76-84
Koichi TAKAKI, Hironori DENDO, Takumi KONISHI, Sawato IGARASHI, Katsuyuki TAKAHASHI, Seiji MUKAIGAWA