Preliminary study for deposition of Mg2Si thin films with high-power impulse magnetron sputtering
Released on J-STAGE: April 26, 2023 |
6th Asia-Pacific Conference on Semiconducting Silicides and Related Materials, 2022 (APAC-Silicide 2022)
011003
Keita Mukogawa, Hiroharu Sugawara, Mizuki Fujiwara, Tetsushi Matsuoka, Tetsuhide Shimizu, Taiki Yamamoto, Naoto Saito, Tamaki Hattori, Tatsuro Hanahjiri, Shunji Kurosu