Zirconium-modified lead lanthanum titanate {(Pb0.925La0.075)(Zr
yTi
1-y)0.981O
3+0.5 mass% MnO
2,
y=0-0.10, (PLZT)} ceramics and films were prepared by hot isostatic pressing and rf-magnetron sputtering, respectively. The pyroelectric properties of PLZT ceramics and films were investigated in detail. Assuming that the volume specific heat
Cv of present ceramics and films is 3.2J/cm
3°C, the PLZT films exhibited the highest figures of merit F.M. of 1.4×10
-10Ccm/J for voltage responsivity and F.M.D
* of 1.6×10
-8Ccm/J for specific detectivity of pyroelectric infrared sensors, which were around 7.0 times and 2.8 times, respectively, larger than those of present ceramics and PLZT(4/44/56) ceramics previously reported. The present films of
y=0.04-0.10 are substantially expected as element materials for pyroelectric infrared sensors.
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