Journal of the Vacuum Society of Japan

Journal of the Vacuum Society of Japan

Published by The Vacuum Society of Japan

1,132 registered articles
(updated on April 20, 2026)

Online ISSN : 1882-4749
Print ISSN : 1882-2398
ISSN-L : 1882-2398

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2017 Volume 60 Issue 12

Development of a UHV-compatible Low-energy Electron Gun using the Photoelectric Effect Hiroyoshi SAWA, Mao ANZAI, Tatsuya KONISHI, Takayuki TACHIBANA, Takato HIRAYAMA
Influence of Space Charge on the Relative Sensitivity Coefficient of a Triode Gauge Shigemi SUGINUMA, Masahiro HIRATA, Tokihiko KOBATA
Fabrication of Stackable Knudsen Pump Driven by Hot Water Shota TAMURA, Hiroshi SUGIMOTO
Report on Exhibition of Vacuum Experiments at the 2017 Youngsters' Science Festival in Koganei Masuaki MATSUMOTO

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Most viewed articles (March 2026)

1

Fundamentals of Processing Plasma

Released on J-STAGE: July 16, 2016 | Volume 59 Issue 7 Pages 161-170

Yukio OKAMOTO
2

Fundamentals of Plasma for Vacuum Engineers

Released on J-STAGE: August 25, 2014 | Volume 57 Issue 8 Pages 308-312

Takeo NAKANO
3

Part (II) Activity Report by Members of the Vacuum Society of Japan (No. 1)

Released on J-STAGE: September 01, 2012 | Volume 55 Issue 6 Pages 262-290

Hitoshi AKIMICHI, Kenta ARAI, Yoshitaka HAYASHI, Masahiro HIRATA, Tadao MIURA, Hajime YOSHIDA
4

Basic Concepts to Kinetic Theory of Gases

Released on J-STAGE: June 28, 2013 | Volume 56 Issue 6 Pages 199-203

Namio MATUDA
5

Fundamentals of Chemical Vapor Deposition Technologies

Released on J-STAGE: July 16, 2016 | Volume 59 Issue 7 Pages 171-183

Atsushi SEKIGUCHI

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