Denki Kagaku oyobi Kogyo Butsuri Kagaku

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Volume 40, Issue 7

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Comment

[title in Japanese]

[in Japanese]

1972 Volume 40 Issue 7 Pages 461
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.461

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Features

[title in Japanese]

[in Japanese], [in Japanese]

1972 Volume 40 Issue 7 Pages 462-468
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.462

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Survey

[title in Japanese]

[in Japanese], [in Japanese], [in Japanese]

1972 Volume 40 Issue 7 Pages 469-472
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.469

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Technical Papers

A New Multi-level Metalization for LSI

Katsuya OKUMURA, Katsuo MATSUSHIMA

1972 Volume 40 Issue 7 Pages 473-478
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.473

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Glass-Passivation of Silicon Devices by Electrophoresis

Kiyoshi MIWA, Mitsuko KANNO, Sadami KAWASHIMA, Susumu KAWAMURA, Takehi ...

1972 Volume 40 Issue 7 Pages 478-484
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.478

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Electromigration in Titanium-Platinum-Gold Metallization System

Sadayuki KISHI, Umihiko SAITO, Akitomo NAKAMURA

1972 Volume 40 Issue 7 Pages 485-487
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.485

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Effects of Diffusion on Instabilities of poly Si-Si₃N₄-SiO₂-Si Structure

Syoji FUJIMOTO, Masahiro MAEKAWA, Yasukazu INOUE, Yuichi HANETA

1972 Volume 40 Issue 7 Pages 488-492
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.488

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Application of Anodic Oxidation to Interconnect System

Hideo TSUNEMITSU, Hiroshi SHIBA

1972 Volume 40 Issue 7 Pages 493-498
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.493

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[title in Japanese]

[in Japanese], [in Japanese]

1972 Volume 40 Issue 7 Pages 499-503
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.499

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[title in Japanese]

[in Japanese], [in Japanese], [in Japanese]

1972 Volume 40 Issue 7 Pages 504-509
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.504

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[title in Japanese]

[in Japanese]

1972 Volume 40 Issue 7 Pages 510-515
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.510

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[title in Japanese]

[in Japanese], [in Japanese]

1972 Volume 40 Issue 7 Pages 515-521
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.515

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[title in Japanese]

[in Japanese], [in Japanese], [in Japanese]

1972 Volume 40 Issue 7 Pages 521-525
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.521

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[title in Japanese]

[in Japanese], [in Japanese], [in Japanese]

1972 Volume 40 Issue 7 Pages 525-530
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.525

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[title in Japanese]

[in Japanese], [in Japanese], [in Japanese], [in Japanese]

1972 Volume 40 Issue 7 Pages 531-536
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.531

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[title in Japanese]

[in Japanese], [in Japanese], [in Japanese], [in Japanese]

1972 Volume 40 Issue 7 Pages 536-541
Published: July 05, 1972
Released on J-STAGE: November 18, 2019

DOIhttps://doi.org/10.5796/kogyobutsurikagaku.40.536

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