Dechuck Operation of Coulomb Type and Johnsen-Rahbek Type of Electrostatic Chuck Used in Plasma Processing

Released on J-STAGE: February 20, 2009 | Volume 3 Pages 051

Gyu Il SHIM, Hideo SUGAI

Review of Helicon High-Density Plasma: Production Mechanism and Plasma/Wave Characteristics

Released on J-STAGE: May 17, 2018 | Volume 13 Pages 1101014

Shogo ISAYAMA, Shunjiro SHINOHARA, Tohru HADA

Plasma Effects on Electrostatic Chuck Characteristics on Capacitive RF Discharge

Released on J-STAGE: January 25, 2008 | Volume 2 Pages 044

Gyu Il SHIM, Takeshi YAMAUCHI, Hideo SUGAI

Presentation of the New SOLPS-ITER Code Package for Tokamak Plasma Edge Modelling

Released on J-STAGE: February 04, 2017 | Volume 11 Pages 1403102

Xavier BONNIN, Wouter DEKEYSER, Richard PITTS, David COSTER, Serguey VOSKOBOYNIKOV, Sven WIESEN

Validity of Electron Temperature Measurement by Using Boltzmann Plot Method in Radio Frequency Inductive Discharge in the Atmospheric Pressure Range

Released on J-STAGE: August 10, 2006 | Volume 1 Pages 028

Noriyasu OHNO, M. Abdur RAZZAK, Hiroshi UKAI, Shuichi TAKAMURA, Yoshihiko UESUGI