Microwave power at 14 GHz has excited a H
2 plasma in a 2 cm inner diameter 9 cm long alumina tube to generate negative hydrogen ion (H
−) beam. A pair of permanent magnets created a magnetic field with the intensity corresponding to an electron cyclotron resonance condition for the input microwave. The ion source produced stable plasmas with the H
2 pressure more than 0.5 Pa, while the amount of H
− current decreased exponentially against increasing ion source pressure above 0.6 Pa. When the source produced H
− beam with constant H
2 pressure at 0.6 Pa, the H
− beam current saturated against the increase of microwave power above 200 W. These characteristics of the H
− beam current indicate poor transport of vibrationally excited hydrogen molecules and that of H
− to the ion extraction electrode.
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