High saturation magnetization is required for BiFeO3-based multiferroic(ferromagnetic/ferroelectric)thin films to apply magnetic writing element of Racetrack Memory which is a nextgeneration magnetic recording device. A newly introduced laser-assisted heating system was used to form high quality(Bi, A)FeO3(A=Ca, Sr, Ba(alkaline earth metal))thin films. The maximum substrate temperature was increased from 695 to about 858℃ by using this laserassisted heating system combining with lamp heating system of sputtering equipment. In the case of(Bi, Ca)FeO3 and(Bi, Sr)FeO3 with the Ca or Sr substitution concentration of 50~ 60 at% fabricated by using the laser-assisted heating system, the crystallinity was improved, but oxygen vacancy could not be suppressed. As the result, saturation magnetization was not large. In the case of(Bi, Ba)FeO3 with the Ba substitution concentration of 50~60 at% fabricated by using the laser-assisted heating system, oxygen vacancy could be suppressed. As the result, highest saturation magnetization of around 100 emu/cm3 was obtained in(Bi, Ba)FeO3 thin films.
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