Synthesis of novel oxide layers on titanium by combination of sputter deposition and micro-arc oxidation techniques

Abstract

A novel coating technique of thin ceramic layer resembling teeth color on titanium (Ti) surface was developed by combination of sputter deposition of metal zirconium (Zr) and subsequent micro-arc oxidation (MAO) treatment. The oxide layer grown by MAO treatment had a porous structure with a thickness of approximately 6 micrometers and was mainly composed of zirconium dioxide (ZrO₂) with both tetragonal and monoclinic crystal structures. The surface of the specimen was hardened by this technique, and the hardness of the specimen was significantly larger than that of untreated Ti and MAO-treated Ti without Zr layer. The bonding strength test revealed that fracture occurred inside the oxide layer, indicating that adhesion between the oxide layer and the Ti substrate was sufficiently strong. From these results, this technique has an advantage for the development of novel dental materials with excellent mechanical and aesthetic properties.