抄録
An accurate, high-efficiency light sectioning technique is required for the measurement of 3-D surface shapes. To obtain 3-D information, a mechanical scanning construction or multislit lighting is necessary. However, the former requires a long measurement time for the scanning procedure and the latter a complex calculation to separate the overlapped lines. In addition, measurement of a specular surface is often limited because of the specular reflection and/or multiple reflection on the target surface. To realize high-speed 3-D measurement, we propose a new sensing system utilizing a pulse operation laser diode (LD). Pulse operation of LD increased light intensity, resulting in increase of the SN ratio. The need for mechanical scanning was eliminated by employing time-sharing pulse operation of multiple LDs that was synchronous with CCD detection. In the present system, a pair of parallel lightsheets was employed to confirm this idea. A correction scheme for multiple reflection was also proposed. Using this system, 3-D shape of a soldering surface was measured.
