2019 年 62 巻 5 号 p. 276-281
Two ISO standards related to quadrupole mass spectrometer (QMS) are introduced ; one is ISO 14291:2012 Definitions and specifications for quadrupole mass spectrometer and the other is ISO/TS 20175:2018 Characterization of quadrupole mass spectrometers for partial pressure measurement. This paper consits of two parts. This first part includes the background that these ISO standards were developed and the definition of sensitivity and relative sensitivity factor of QMS.