【表面と真空 (Vacuum and Surface Science)】は，日本真空学会と日本表面科学会が共同で出版する学術論文誌です。両学会の合併に伴う新学会（日本表面真空学会）の発足に先立ち，2018年1月に創刊された新しいジャーナルになります。前身誌は日本真空学会の【Journal of the Vacuum Society of Japan】と日本表面科学会の【表面科学】になり，双方の記事種を踏襲し，その上で新たな分野への展開を目指しています。巻号は，歴史のより長い【Journal of the Vacuum Society of Japan】の巻数を引き継ぎ，第61巻からの創刊となります。
Semiconductor cleaning is a very important process in integrated circuit manufacturing, and the removal of high dose ion implanted photoresist is a big challenge in semiconductor cleaning owing to their carbonized crust layer generated on and near the surface of the photoresist layer. Microbubbles are a promising candidate in single wafer spin cleaning process for the removal of the crust generated photoresist without any substrate loss. And the bubbles are gas bodies less than 50 micrometer in diameter and shrink underwater due to the rapid dissolution of the interior gas. It has been demonstrated that the bubbles can generate free radicals during the collapsing process under water through the dispersion of the elevated energy accumulated as the surface electricity during the collapsing process of microbubble. In this article the author introduces the fundamental properties of microbubble and their several examples relating to semiconductor cleaning.
This report is a personal research history of the author. The author engaged in the extreme high vacuum project in 1988. Before that time, the research field of the author was limited to the surface finishing of metals. However, since 1988 the author has been stimulated by the intense communication with researchers of different fields, and the author’s research field has been expanded even to the standardization of surface analyses. The author has been involved in the activities of Japan Vacuum Society and Surface Science Society of Japan since 1980’s. Through these activities in societies, the author could get to know many nice researchers, and these researchers help the author to challenge new research fields. Extreme high vacuum is one of the bridges between vacuum and surface. The author believes there are many bridges between vacuum and surface, and communications through these bridges will make the society more active.