e-Journal of Surface Science and Nanotechnology
Online ISSN : 1348-0391
ISSN-L : 1348-0391
Conference -ISSS-7-
Relation between the Step Pattern and the Velocity of the Moving Linear Adatom Source
Kazuhiro KishiMasashi KawaguchiHitoshi MiuraMasahide SatoMakio Uwaha
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2015 Volume 13 Pages 269-274

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Abstract

During deposition of Ga atoms on a Si(111) vicinal face, a step on the vicinal face shows a comb-like pattern. Keeping the formation of comb-like pattern in mind, we carry out phase field simulations, in which a linear adatom source advances in front of a step. The comb-like pattern consisting of straight finger-like intrusions is formed when the source velocity is smaller than a critical value determined by the step anisotropy. Initially, the straight step is unstable and step wandering is induced by the asymmetry of the surface diffusion field. The amplitude of step fluctuations increases with time and an array of short intrusions is formed. Shorter intrusions cannot catch sufficient adatoms, so that coarsening of the pattern occurs. When the adatom source moves slowly, the intrusions grow long and the step shows a regular comb-like pattern. By the coarsening, the distance between intrusions is several times larger than the initial value. The pattern is metastable for a rapid change in the source velocity. When the adatom source moves fast, the intrusions cannot keep up with the adatom source and an irregular pattern is formed. When the strength of crystal anisotropy is weak, splitting of the tips of intrusions frequently occurs and the step shows an irregular seaweed-like pattern. With a strong crystal anisotropy, the step shows a dendrite pattern. [DOI: 10.1380/ejssnt.2015.269]

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