Abstract
As to the design of clean rooms, theoretical approaches and analyses were not sufficiently developed and the U. S. A. Federal Standard 209 B was generally applied. At present, the equation of homogeneous momentary diffusion is used for calculations. There is a problem, however not only in reducing particulate concentration in clean room but also in decreasing the number of particles reaching the objective as well as their adhesion ratio. Particulate behavior in clean rooms is considered at three scales, which are : (1) macro analysis of the whole clean room (2) analysis of particulate behavior near the objective (3) analysis of particulate adhesion mechanisms. From the viewpoint of above-mentioned items (2) and (3), it is very important to make direct micro-measurement of particulate bahavior near the objective and adhesion to it without field disturbance. In this paper, a remote detection system of particles in clean rooms is described, Particulate scattered light of a He-Ne laser is remotely detected by using an optical system, a video system and an image processing system. Furthermore, by using the system, particulate behavior near the objective and adhesion are evaluated. These results are considered to be useful for the development of design methods for unidirectional airflow type clean rooms.
