2004 年 69 巻 580 号 p. 39-44
A numerical method to predict the air cleaning ability of unidirectional flow cleanrooms is examined. C.F.D is used to calculate three-dimensional turbulent airflows and the change, called decay, of the particulate concentration in the cleanroom by the personal computer. Calculations for various opening ratio of the HEPA filter ceiling (the filter coverage) are made and compared with the experiments. The start-up time is defined as the decay time needed to reduce the particlate concentration from its initial value to 10^<-6> level and is applied to indicate the air cleaning ability. The air cleaning ability is classified into two grades by the opening ratio of the HEAP filter ceiling (the filter coverage). When the opening ratio is equal or larger than 70%, the concentration decay is extremely fast and the start-up time is very short. The flow pattern could be considered the piston flow. For less than 70%, the concentration change is similar to the perfect mixing