クリーンルーム空気に含有される水溶性有機ガスの気液分配率
2004 年 69 巻 580 号 p. 53-59
詳細
2004 年 69 巻 580 号 p. 53-59
It is said that wet type air cleaner is expedient for the treatment of some kind of organic, acid, and basic gas. In this study, we examined three experimental methods in order to evaluate the possibilities of removing six organic gases. Lowest detection limits are 8.2×10^<-3>mgC/L with the vial method. 8.2×・10^<-5>mgC/L with the Erlenmeyer flask method, and 3.3×10^<-6>mgC/L with the impinger method. The gas-liquid division rate (gas phase concentration/liquid phase concentration) of isopropanol, 1-methoxy-2-acetoxypropane and 1-methoxy-2-propanol are comparatively higher than those of dimethyl sulfoxide, 2-(2-ethoxyethoxy)ethanol, and 2-(2-butoxyethoxy)ethanol. The relationship between temperature and gas phase concentration is exponential. The water solubility of isopropanol, 1-methoxy-2-acetoxypropane and 1-methoxy-2-propanol conforms to Henry's law.
