抄録
The evaluation of outgassing emission rate from cleanroom construction materials is an important technology to control the concentration of airborne molecular contaminants in the clean room air. The CR-ADPAC system (Clean Room-ADvanced Pollution and Air quality Chamber system) was developed to evaluate the outgassing emission rate in consideration of an actual cleanroom for electronic device fabrication. The CR-ADPAC system is consisted of a small stainless steel chamber equipped with an inner circulation fan and purified air supply unit which supplies humidified controlled air. It is able to control temperature, humidity, ventilation rate and the air velocity on the surface of test piece. The measurements of outgassing emission rates from sealants were performed using the CR-ADPAC. It was clarified that the air velocity on the surface of test piece influenced remarkably on the outgassing emission rate.
