抄録
We have tried to realize an X-ray imaging spectrometer based on the superconducting transition edge sensor (TES) with high energy resolution, a large pixel array, a relatively high absorption efficiency and a high count rate. Our single pixel of Ir/Au TES achieved an excellent energy resolution of 9.4 eV for 5.9 keV X-rays. We have also proposed a pixellated array of Ir-TES where we slightly modify the bias point of each pixel and identify the pixel from the response function of each pixel. Our 10-pixel device, where all pixels are parallel biased, obtained 13 eV (FWHM) at 3 keV energy resolution and 80 µm position resolution. So far, we could successfully operate a 20-pixels device. Further, we are now trying to improve the count rate and the absorption efficiency of TESes, by developing our original new TES geometry which having a radiation absorber that self-adjusts the operating temperature.
