Development of New Computer-Aided Microanalyzer and Its Application to Iron and Steel Analysis

Abstract

A computer-aided microanalyzer (CMA) developed as a new instrument for comprehensive state analysis of iron and steel samples is described with respect to its principle, apparatus, method and application in that order. The instrument irradiates a sample by an electron beam in vacuum and measures generated characteristic X-rays. After repeating this series of operations at each of over 10⁴analysis spots, the CMA processes the measured values with a computer, and displays the images in order to analyze the macroscopic and microscopic segregations of elements in samples, 0.5×0.5 to 100×100mm in size. Besides these basic functions, it can also perform the comprehensive state analysis of samples, including the analysis of carbon equivalent (C_eq) and inclusions. It is expected to find effective use in applications other than the analysis of iron and steel samples.