Abstract
In order to reduce the plasma fluctuation caused by large amounts of hydrogen, a hydrogen-separation membrane module, consisting of hollow fibers of an aromatic polyimide, was connected to a continuous-flow mode hydride generator. To overcome the relatively long time necessary to reach a steady-state signal and the large memory effect at room temperature, the membrane was operated at high temperature (ca. 80°C). The proposed hydride generation
system was successfully applied to a low-power ICP (>0.6kW). The detection limits for AsH3, GeH4, SbH3 and SnH4 were improved by a factor of about three at the maximum. The relative standard deviations of emission intensities at 50ng/ml were below 1%.
