抄録
Molecular dynamics simulations were performed to estimate the composition of deposited products from alumina ablation plume at the atomic level. The parameters considered were the Al/O ratio of ablation plume and the temperatures of ablation plume and recovery plate surface. Simulation results showed that oxygen-deficient alumina was formed on the recovery plate surface, whose Al/O ratio was in good agreement with the composition of oxygen-deficient alumina obtained in the experiment. The simulation results also showed that the Al/O ratio of the deposited layer could be increased when the Al/O ratio of the alumina ablation plume was larger and the temperature of the recovery plate surface was higher. These results suggest that the Al/O ratio can be increased by repeated process of laser ablation and deposition of ablation plume, and the relationship between the Al/O ratio and the number of repetitions of this process was modeled and evaluated.
