抄録
Characteristics of the inductively coupled nitrogen plasma driven by high voltage burst pulses
with 150 kHz-band were investigated. The results showed that the coil current of 64 A flowed into
the solenoid coil at 300 V applied voltage, which was consistent with 83 Ω of equivalent load
impedance before the plasma ignition. The coil voltage and current decreased to 2.7 kV and 45 A, respectively, with plasma ignition. The electron temperature and the ion density were obtained as 3.0 eV and 4.1×1019 m-3, respectively, at the position of 45 mm by a double probe method. The ion density increased with increasing input power. On the other hand, the electron temperature was almost independent of the input power. The electron temperature slightly decreased with increasing the gas pressure. The ion density was almost independent of the gas pressure. The electron temperature and the ion density decreased with increasing distance from position of the coil center. The emission intensity of the nitrogen second positive system (SPS; 337.1 nm) and first negative system (FNS; 391.4 nm) increased with increasing input power. The ratio of FNS/SPS increased with increasing input power.
