Studies on Pneumatic Hydrostatic Positioning Control Device

Abstract

We aim at developing a new positioning control system that has suitable stiffness and ability of controlling its position within 0.01 [μm] order. Therefore, we produce a new positioning control device using pneumatic hydrostatic pressure. As the first report, this paper describes experimental results of basic characteristics of the trial device such as the distribution of its pressure, the positioning object and the vibration property. The results obtained are as follows, (1) The using pads are made very easily, but the pressure at lower side of the gas supply holes are extremely higher than other places. (2) The distribution of its pressure changes according to the increase of the object weight and the load-carrying capacity of the device balances its weight. (3) The floating height of the object according to the supply pressure is 14 [μm/kg/cm2]. (4) Its stiffness is 0.56 [kg/μm]. (5) The natural frequency of the significant mode of the object controlled is about 5 [KHz] and the damping ratio is 0.008.