木更津工業高等専門学校紀要
Online ISSN : 2188-921X
Print ISSN : 2188-9201
ISSN-L : 0285-7901
微小接合を考慮した超伝導素子の作製プロセス
石井 孝一
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研究報告書・技術報告書 フリー

1999 年 32 巻 p. 7-10

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This paper is a proposal of a new SIS making process. One of a proposal is a method that I easily can wire to a small junction. Another is to be a few and be able do for damage by etching to small junction. This making process is the following method. At first, it make wiring portion and large junction structure. As being next, the portion to have been shaved with etching process fill up to become a same height as another portion. Last process, it make for the very small SIS junction that was connected with for 2 series. By this method, for a flat portion, a making of a SIS junction by an electronic exposure gets possible. And, an influence of etching against SIS junction is once it. Damage by etching gets a few if it is in comparison to a former making process. Further, it thinks that this making process can apply it for a bolometer mixer device making also.

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© 1999 独立行政法人 国立高等専門学校機構 木更津工業高等専門学校
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