サブミリ波帯用格子冷却光電子ボロメータミキサ素子の作製

抄録

We made a lattice cooled photoelectron super-conduction bolometer. An NbN was employed as a thin film material. We evaluated a critical temperature for thickness of NbN thin film. Also, we measured resistance of a thin film. We established a process of making a lettice cooled photoelectron bolometer. By using film of four kinds of 15,10,7.5 and 5 [nm] thickness, we made a bolometer. A good DC characteristic of a bolometer was obtained. However, with a problem of aging for a thin film, we wasn't able to measure RF characteristic.