THE BULLETIN OF NATIONAL INSTITUTE of TECHNOLOGY, KISARAZU COLLEGE
Online ISSN : 2188-921X
Print ISSN : 2188-9201
ISSN-L : 0285-7901
Development of Spectroscopic Ellipsometry Measurement System
Maki HOSHINO, Satoru SUZUKI
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Keywords: ellipsometry, ellipsometric parameter, photoelastic modulator, PEM, polarization
RESEARCH REPORT / TECHNICAL REPORT FREE ACCESS

2002 Volume 35 Pages 167-170

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[in Japanese]

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© 2002 National Institute of Technology, Kisarazu College
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