Transport Properties of Anatase Ti_<1-x>Nb_xO_2 Transparent Conductive Oxide(Current Topic)

Abstract

We, here, introduce transport properties and carrier scattering mechanism of a new transparent conductor, anatase Ti_<1-x>Nb_xO_2 epitaxial thin film. Anatase TiO_2, a wide gap semiconductor, show semiconductor to metal transition on Nb doping. It became clear that Ti 3d conduction band has weak nonparabolicity. Further, we revealed that the carrier scattering is dominated by grain boundaries and neutral impurity scattering.