Proceedings of JIEP Annual Meeting
The 28th JIEP Annual Meeting
Session ID : 5C-10
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Host: Japan Institute of Electronics Packaging

The 28th JIEP Annual Meeting
Fabrication of MEMS Rotary Actuator with Multilayer Ceramic Coil
*Minami Takato, Tatsuya Nishi, Ken Saito, Fumio Uchikoba
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Keywords: multilayer ceramic technology, MEMS, rotary actuator, ferrite
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[in Japanese]
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© 2014 The Japan Institute of Electronics Packaging
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