Raman-Scattering Spectroscopy of Epitaxial Graphene Formed on SiC Film on Si Substrate

Yu Miyamoto; Hiroyuki Handa; Eiji Saito; Atsushi Konno; Yuzuru Narita; Maki Suemitsu; Hirokazu Fukidome; Takashi Ito; Kanji Yasui; Hideki Nakazawa; Tetsuo Endoh

doi:10.1380/ejssnt.2009.107

Regular Papers

Raman-Scattering Spectroscopy of Epitaxial Graphene Formed on SiC Film on Si Substrate

Yu Miyamoto, Hiroyuki Handa, Eiji Saito, Atsushi Konno, Yuzuru Narita, Maki Suemitsu, Hirokazu Fukidome, Takashi Ito, Kanji Yasui, Hideki Nakazawa, Tetsuo Endoh

Author information

Yu Miyamoto
Research Institute of Electrical Communication, Tohoku University, Japan
Hiroyuki Handa
Research Institute of Electrical Communication, Tohoku University, Japan
Eiji Saito
Research Institute of Electrical Communication, Tohoku University, Japan
Atsushi Konno
Research Institute of Electrical Communication, Tohoku University, Japan
Yuzuru Narita
Department of Electrical Engineering, Yamagata University, Japan
Maki Suemitsu
Research Institute of Electrical Communication, Tohoku University, Japan
CREST, Japan Science and Technology Agency, Japan
Hirokazu Fukidome
Center for Interdisciplinary Research, Tohoku University, Japan
Takashi Ito
Center for Interdisciplinary Research, Tohoku University, Japan
Kanji Yasui
Dept. of Electrical Engineering, Nagaoka University of Technology, Japan
Hideki Nakazawa
Dept. of Materials Science and Technology, Hirosaki University, Japan
Tetsuo Endoh
Center for Interdisciplinary Research, Tohoku University, Japan

Keywords: Silicon carbide, Heteroepitaxy, Organosilane, Gas-source MBE, Graphene

JOURNAL FREE ACCESS

2009 Volume 7 Pages 107-109

DOI https://doi.org/10.1380/ejssnt.2009.107

Erratum : e-JSSNT Vol. 7, p. 699 (2009)

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Abstract

By conducting a 1200°C vacuum annealing of a 3C-SiC(111) ultrathin film preformed on a Si(110) surface, we have succeeded in forming a graphene layer on a Si substrate. Raman-scattering spectrum from this surface presents a distinct 2D band, whose deconvolution into four subcomponents indicates that the film mostly consists of a two-layer graphene. The peak position is blue-shifted from that of a free-standing graphene formed by a mechanical exfoliation method, suggesting a compressive stress in the film. [DOI: 10.1380/ejssnt.2009.107]

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