抄録
Alignment layer is one of the important components to fabricate LCD panel, and has been used to align liquid crystal molecules. It is necessary to evaluate the alignment layer after surface treatment to clarify the structure of it. However the conventional technique that used Ellipsometer measures the thickness of alignment layer as one layer and isotropic medium. As the surface of the alignment layer becomes a uniaxial layer after treatment, the conventional method is difficult to obtain the acceptable results. In this report, we measured the thickness of the alignment layers that are assumed to be uniaxial and isotropic medium by using PI-Checker, and then confirmed the validity of these measurement results.
