2003 Volume 71 Issue 6 Pages 433-435
A novel microfabricated electrochemical hydrogen cyanide gas sensor was developed. This sensor consisted of a gas permeable membrane, an electrolyte solution, a working electrode, a counter electrode, a sensor body and other components. Several microparts were produced using microfabrication techniques; a microporous silicon membrane by DeepRIE, a quartz glass sensor body by dicing, and Ag/Pt/Ti thin membranes as electrodes by ECR sputtering. The size of the sensor was 5×5×3 mm, which was 1/467 when the volume compared with commercially available sensors. This sensor showed good performance for hydrogen cyanide gas detection with respect to linearity and rapid-ness of response.
