Recent advance on X-ray fluorescence, diffraction and absorption analyses of the earth and planetary materials using synchrotron radiation were overviewed. SR-XRF technique is suitable for nondestructive trace element analysis and chemical state analysis of the geological samples. Utilization of X-ray microbeam also allows us to carry out two-dimensional analysis of trace elements in ppm level in a few micron regions. Characteristics of the SR-XRF techniques were illustrated through the application of the methods to lunar rocks, cosmic dusts, and Banded Iron Formation. New features of the 3rd generation SR light source, SPring-8, and its perspective are described.