抄録
DLC (Diamond-Like Carbon) film formation technologies on the surface of 3-dimensional substrates by a uniform plasma-based ion implantation / deposition (PBIID) have been developed by applying pulse voltage coupled with RF voltage to the substrates, such as plastics, rubbers as well as metals with the similar deposition rate. DLC film onto rubbers, plastics is effective to wear resistance, low friction, gas barrier, corrosion resistance, anti thrombus and non-cohesiveness. These technologies are widely applicable to the automobile parts, mechanical parts, electronic parts and metal molds for rubbers and plastics.
In this paper, the DLC film formation technologies by applying both RF and pulse voltage, their applications and their prospect are presented.
