水素選択透過シリカ膜のモジュール化のための基礎的研究

抄録

Hydrogen permselective silica membranes were prepared by using a counter diffusion chemical vapor deposition method. H₂ permeances through silica membranes were over 8x10^-8 mol m^-2 s^-1 Pa^-1, and H₂/N₂ permeance ratios were over 500 at 873 K. Reproducibility of the silica membranes were 87%. Pore size of an alumina substrate was important parameter to obtain higher H₂ permeances. H₂ permeance was lager through a silica membrane deposited on a substrate having smaller pore size. Activation energies of H₂ permeance through the silica membranes increased with increasing the deposition temperatures. However, the membranes prepared over 873 K were not stable under steam at 773 K. A 3 membranes module was employed for the simultaneous multi membranes deposition of silica layers. H₂ permeance through the module was 5.0 x 10^-8 mol m^-2 s^-1 Pa^-1, and H₂/N₂ permeance ratio was 3200 at 873 K. The deposited silica membrane properties on the membrane module was similar to that deposited on a single membrane substrate.