TiO2 anchored silica fibers(TAS) were prepared by chemical vapor deposition using titanium tetraisopropoxide and 1,3-butanediol. Titanium alkoxy-diolate was generated on silica fibers by the reaction of gaseous titanium tetraisopropoxide with silica surface-modified with 1.3-butandiol, which was deposited on silica filter prior to the exposure of titanium tetraisopropoxide. When the photo-decomposition of gaseous acetaldehyde was carried out under UV light illumination, the acetaldehyde photo-decomposition rate of TiO2 in TAS showed 1.4 times as high as the same amounts of P-25 and JRC-TIO-4. It is considered that the cause of high photocatalytic activity of TAS is thinning the titanium oxide and migration of Si from silica fiber.