特集 高エネルギー実験用測定器開発の現状
固体位置検出器
1994 年 20 巻 2 号 p. 5-14
詳細
1994 年 20 巻 2 号 p. 5-14
A Gas chamber has been used to detect a position of minimum ionizing particle, but recently a position sensitive solid state device was developped. A strip structure of p-layer was formed on the surface of n-type substrate.
By conncting a low noise charged current amplifier to every electrode, we can detect one dimensional coordinate (projection) of passing throuh charged particle. High density preamplifier array, for example ENC(equivalent noise charge)is 500 and number of channel is 128 on a small chip of 7*7mm2, was developped to achieve a very high resolution detecter with the pitch around 30 micron.
More useful detecter was developed by forming a strip structure on back surface in similler structure of surface. This device is called Double Sided Silicon Strip Device(DSSD). DSSD is the unique electric detecter which give a spacial position of a minimum ionizing charged particle with an accuracy in seviral micron.
