Micro Ceramic Pattern with Nano-sized Particles Using a Micro Mold

Abstract

Micro molding in capillaries (MIMIC) is promising a bottom up approach to fabricate micropattern using nano-sized ceramic particles. In this report, we have recently achieved two techniques for MIMIC process. One is a replication of PDMS micro-mold without using a master mold made of silicone wafer. The technique provides cost effective PDMS molds using duplicated from polymer master molds. The other is a new MIMIC technique to fabricate ceramic striped pattern with nano particles assisted by infiltrative liquid. For example, striped patterns with lines of 10μm in width were constructed using about 30 nm SnO₂. The line length of the patters reached up to 2 mm by infiltrating the step of 5 times repeat. This new idea improved the issues in fabricating ceramic patterns with long length in conventional MIMIC process. At the moment, we are making master molds made of silicone wafer using lithography technique. We will promote the investigation on MIMIC process for nano-sized particles suspension in a comprehensive and systematic fashion.