Direct Deposition of Nanoparticles Films Using Nanoparticle Beam Source

Abstract

We have performed modification of yttrium iron oxide nanoparticle films in high-density RF plasmas sustained at high operating gas pressure. Experiments for argon plasma showed phase separation which occurred by oxygen deficiency and no phase transformation to YIG. Modification by adding Ar gas to oxygen gas resulted in significant structure change. These results suggest that the plasma sustained for argon/oxygen mixture gas have enough enthalpy for phase transformation to YIG. The addition of oxygen in Ar plasmas is effective for suppression of phase separation and enhancement of phase transformation to YIG.