Hosokawa Powder Technology Foundation ANNUAL REPORT
Online ISSN : 2189-4663
ISSN-L : 2189-4663
Research Grant Report
Direct Deposition of Nanoparticles Films Using Nanoparticle Beam Source
Kosuke Takenaka
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RESEARCH REPORT / TECHNICAL REPORT FREE ACCESS

2007 Volume 15 Pages 46-50

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Abstract

We have performed modification of yttrium iron oxide nanoparticle films in high-density RF plasmas sustained at high operating gas pressure. Experiments for argon plasma showed phase separation which occurred by oxygen deficiency and no phase transformation to YIG. Modification by adding Ar gas to oxygen gas resulted in significant structure change. These results suggest that the plasma sustained for argon/oxygen mixture gas have enough enthalpy for phase transformation to YIG. The addition of oxygen in Ar plasmas is effective for suppression of phase separation and enhancement of phase transformation to YIG.

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