Flow Effects on the Morphology of Silicon Materials Produced in a Gas Phase Reaction of SiCl₄

抄録

Chemical reaction formula does not provide information on size and morphology of formed solids. In this talk, we introduce our recent results on process-dependent changes in size and morphology of silicon solids produced via zinc reduction of SiCl₄. Silicon whiskers, microparticles and nanowires form in the reaction, in which zinc vapor reduces SiCl₄ and zinc droplets catalyse crystallization of silicon. Flow of gases in a reactor and temperature of substrate affect solidification processes of silicon. Effects of there factors on the formation of silicon whiskers and nanowires are discussed using both experimental results and numerical analysis.