Surface processing of PTFE (Polytetrafluoroethylene) using high E/n discharge in nitrogen rich condition was carried out. In the paper, to know a kind of introduced polar groups and chemical stability of the surface by the processing, the sample was rinsed with the water and the water was analyzed by FT-IR (Fourier transform infrared spectroscopy) and measured pH. Further, to know a chemical change by the rinse, depth profile was carried out using angle-resolved XPS (X-ray photoelectron spectroscopy). From the results, many polar groups including oxygen and nitrogen were introduced on the surface. pH of the water decreased and polar groups such as -NO2 and -COOH were detected in the water. Surface energy and component were changed a little by the rinse. It was suggested that the processing is able to increase surface energy with chemical stability.
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