Microplasma as a New Science and Technology

抄録

Microplasmas with the size of hundreds microns open new world of physics and technology on plasmas. They are formed anywhere you want with the required characteristics and the necessary and sufficient volume. Creation schemes are classified into roughly three modes, namely, concentrated energy mode, space-limited mode, and mass-limited mode. Since the plasmas are in the extremely non-equilibrium state, they will be applied to active plasma devices, new functional material syntheses, micro electro mechanical systems, and ultra-short wavelength light sources.