Pulsed High-Current Generator for EUV Source Development

Abstract

A repetitive pulsed high current generator has been developed and tested. It has been developed for generation of high-density plasma as an extreme ultraviolet (EUV) source. This generator has a peak output of current over 40 kA with a pulse width of less than 400 ns. The generator consists of a semiconductor switch and a magnetic pulse compression (MPC) unit. This paper reports the design details of the circuit and the magnetic switches.