Surface Modification of PMMA using Low Energy Ion Irradiation

Abstract

Surface modification of PMMA (polymethylmethacrylate) was carried out by the irradiation of low-energy nitrogen ions about 100 eV, which is expected to improve the surface property by introduction of a thin modified layer. To clarify the structure and the properties of the modified layer, depth profiles of composition and chemical bonds were analyzed using AR-XPS (Angle Resolved X-ray photoelectron spectroscopy). And, surface hardness was measured by using the nanoindentation test.
From the results, it was confirmed that surface hardness increased and crosslinked structures containing oxygen with nitrogen bonds existed in the modified layer. It was suggested that the existence of the structure brought about the increase of surface hardness.