In the fabrication of electronic products, charging of glass substrate induced in separation process is probable to cause the electrostatic discharge to the devices. We measured the charging potential of glass substrate which was separated from a plate, by using an electrostatic voltmeter. From the experiment, we obtained the following results. The contact electrification potential of glass substrate was dependent on the material of the plate. This phenomenon was related to their effective work functions. Furthermore, the charge quantity on glass depended on the number of contact with the plate and was higher in the smooth surface than in the rough surface.
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