Shielding Effect of Panel Type Active Magnetic Compensation

Abstract

We developed a new shielding system composed of shielding panels by means of an active compensation technique for biomagnetic measurements and electron beam lithography system. The new active compensation system has the main advantage that the panels can be assembled in any shape for the various demands because the unit panel is low weight and small size. In this study, we attempt to confirm the shielding performance of the shielding panel unit in itself and of combined several unit panels by numerical and experimental approaches. Shielding performance of the shielding panel unit and cubic model composed of 24 panels indicate 1/46 and 1/17, respectively.