A Trend in Pulse-Powered Plasma Radiation Source

Abstract

Recent progress of semiconductor power devices has shifted our interests on pulsed-power energy driver from a huge energetic system to a high-average-power compact generator. Intense extreme ultraviolet radiation sources have been developed using those devices. It is considered that they can be the light sources for microscopy and the next generation microlithography. A trend and a prospect for the pulse powered radiation sources are briefly described.