IEEJ Transactions on Fundamentals and Materials
Online ISSN : 1347-5533
Print ISSN : 0385-4205
ISSN-L : 0385-4205
Review
Present Status and Future Prospect of Highly Bright Radiation Sources by Laser-Produced Plasma
Hiroaki Nishimura
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Keywords: laser produced plasma (LPP), laser plasma X-ray, EUV-lithography
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2006 Volume 126 Issue 12 Pages 1195-1198

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Abstract
Properties of laser-produced plasmas (LPP) are described to generate intense radiation for various applications including extreme ultra-violet (EUV) light for next generation lithography. After an overview of LPP physics, state-of-the-art topics relevant to the 13.5 nm EUV source are described
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© 2006 by the Institute of Electrical Engineers of Japan
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