2006 年 126 巻 12 号 p. 1195-1198
Properties of laser-produced plasmas (LPP) are described to generate intense radiation for various applications including extreme ultra-violet (EUV) light for next generation lithography. After an overview of LPP physics, state-of-the-art topics relevant to the 13.5 nm EUV source are described
J-STAGEがリニューアルされました! https://www.jstage.jst.go.jp/browse/-char/ja/